Aerotech’s QNP™ piezo stages and QLAB™ controller make positioning to nanometers incredibly easy. The QLAB™ controller brings high-end functionality with many advanced tools while providing an easy-to-use modern interface. The QNP™ stages offer high-dynamics, sub-nanometer resolution and nanometer-level linearity for higher throughput processes without sacrificing precision. The stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. All of the QNP™ piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. When coupled with Aerotech’s Q-series controllers and drives, the QNP™ piezo nanopositioning stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth.
QNP™ Piezo Stages & QLAB™ Controller
29.09.2015
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